Company
Name:Carbon Tetrafluoride
| CAS:75-73-0 | ||
| WM:88 | ||
| EC NO.:200-896-5 | ||
| Molecular Formula: CF4 | ||
| InChI: InChI=1/CF4/c21(3,4)5 |
| Quality specification for CF4 | ||||
| Item | Unit | Zhongli Standard | ||
| CF4 Purity | % | 99.96 | 99.99 | 99.999 |
| N2 | PPm(v/v) | ≤300 | ≤25 | ≤3.0 |
| O2 | PPm(v/v) | ≤100 | ≤20 | ≤1.5 |
| H20 | ug/g | ≤10 | ≤2.0 | ≤1.0 |
| CO | PPm(v/v) | ≤50 | ≤10 | ≤1.0 |
| CO2 | PPm(v/v) | ≤50 | ≤10 | ≤1.0 |
| HF | ug/g | ≤3.0 | ≤3.0 | ≤0.2 |
| F-C | PPm(v/v) | ≤350 | ≤20 | ≤2.0 |
| SF6 | PPm(v/v) | ≤50 | ≤10 | ≤0.3 |
Refrigerant,gas insulator, dry etching gas, fluoridating agent,surface treatment agent, leak hunting agent for laser gas.
