Name:Carbon Tetrafluoride | |||||||
Tetrafluoromethane (R14) | |||||||
PFC 14 | |||||||
CAS:75-73-0 | |||||||
UN1982 | |||||||
WM:88.00 | |||||||
EC NO.:200-896-5 | |||||||
Molecular Formula: CF4 | |||||||
Main Application | |||||||
Two main grades: Industries and electronics.In semiconductor manufacturing, CF4 in | |||||||
mixture with oxygen is used for plasma cleaning of CVD reactors.Halocarbon 14 is a | |||||||
selective etching agent for many metals, metal silicides and oxides. |